Table 1: Data set-1, (data sample 1 to 5), flatness error, f & plane equation using EGA.

Corresponding Plane Equation (z = ax+by+c) f [mm]
z = -0.00046003x + 0.00001410y 0.0085
z = -0.00042026x - 0.00001100y 0.0082
z = -0.00043873x + 0.00003556y 0.0084
z = -0.00044008x + 0.00001314y 0.0087
z = -0.00048261x - 0.00000062y 0.0084
Average flatness: 0.0084